Methods for forming conductive elements and vias on substrates

ABSTRACT

Methods of forming conductive elements on and in a substrate include forming a layer of conductive material over a surface of a substrate prior to forming a plurality of vias through the substrate from an opposing surface of the substrate to the layer of conductive material. In some embodiments, a temporary carrier may be secured to the layer of conductive material on a side thereof opposite the substrate prior to forming the vias. Structures, including workpieces formed using such methods, are also disclosed.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.11/744,592, filed May 4, 2007, now U.S. Pat. No. 8,183,151, issued May22, 2012, the disclosure of which is hereby incorporated herein by thisreference in its entirety.

FIELD

Embodiments of the present invention relate to methods for formingconductive vias through substrates, such as semiconductor wafers orsemiconductor dies. Embodiments of the present invention also relate tostructures and assemblies that include such substrates and conductivevias.

BACKGROUND

Many different types of substrates are used for various purposes in theelectronics industry. For example, integrated circuits areconventionally fabricated on semiconductor-type substrates to formsemiconductor devices such as, for example, memory devices, imagingdevices, and electronic signal processor devices (i.e., often referredto as microprocessors). Such semiconductor-type substrates include, forexample, full or partial wafers of semiconductor materials such assilicon, germanium, gallium arsenide, indium phosphide, and other III-V-or II-VI-type semiconductor materials. Wafers include, for example, notonly conventional wafers formed completely of a semiconductor material,but other substrates such as silicon-on-insulator (SOI)-type substrates,silicon-on-sapphire (SOS)-type substrates, and epitaxial layers ofsilicon supported by a layer of base material. Other types of substratesare used to form various other components and devices used in theelectronics industry including, for example, circuit boards, contactcards, test carriers, package substrates, and interposer substrates.Such other types of substrates may comprise polymer materials, ceramicmaterials, metal materials, and composite materials, as well as asemiconductor material, usually silicon.

Substrates used in the electronics industry often carry conductivestructures for communicating electrical signals and/or for providingelectrical power to active elements of an electronic device. Suchconductive structures include, for example, conductive traces (whichconventionally extend in a generally horizontal direction relative to amajor plane of the substrates), conductive vias (which conventionallyextend in a generally vertical direction through at least a portion ofthe substrates), and conductive contact terminals (e.g., conductivepads) used for electrically interconnecting other conductive structuresor devices to the conductive structures carried by the substrates.

It is often desirable to provide electrical communication through asubstrate using the aforementioned conductive vias to electricallyconnect conductive traces and/or pads on one side of a substrate toconductive traces and/or pads on the opposing side of the substrate. Asan example, two or more semiconductor devices (e.g., semiconductor diesor packages) may be stacked one on top of another to form a so-called“multi-chip module,” which may be used to reduce the mounting arearequired on a circuit board for each of the semiconductor devicesthereof. In such multi-chip modules, it is necessary to establishelectrical communication between each of the semiconductor deviceswithin the stack and the circuit board. Therefore, conductive vias maybe formed entirely through one or more of the semiconductor devices toallow at least one other semiconductor device stacked thereover tocommunicate electrically with the circuit board through the conductivevias. As another example, the conductive contact terminals on asemiconductor device may be physically arranged in a pattern that doesnot correspond to a pattern of conductive contact terminals on ahigher-level substrate to which it is desired to electrically connectthe semiconductor device. Therefore, it may be necessary to effectivelyredistribute the conductive contact terminals of either thesemiconductor device or the higher-level substrate to enable electricalcontact to be established therebetween. A so-called “redistributionlayer” is often used to effectively redistribute the conductive contactterminals on a semiconductor device. A redistribution layer includesconductive traces that each extends over a surface of a substrate from afirst location to a second location at which another conductive contactterminal may be provided. The second location may correspond to, and becomplementary with, a location of a conductive contact terminal onanother element or device. Additionally, conductive vias may provideelectrical communication to conductive regions on the back side of asemiconductor device to facilitate back-side probing. Back-side probingmay be useful in identifying any defects in the semiconductor devicebefore it is further processed, packaged or assembled with otherdevices.

As used herein, the term “substrate” refers to any electronic structureor device that comprises a conductive via, or through which it isdesired to form a conductive via. By way of example and not limitation,substrates may include semiconductor dies, full or partial semiconductorwafers, semiconductor devices (e.g., memory devices, imaging devices,and electronic signal processors), circuit boards, and layers ofsemiconductor, polymer, ceramic, or metal materials, or a combinationthereof.

To form a conductive via, a via may be formed through a substrate usingany one of a variety of methods, including mechanical drilling, laserablation, and wet (chemical) or dry (reactive ion) etching. As usedherein, the term “via” refers to a hole or aperture that extends througha substrate, while the phrase “conductive via” refers to a via that isat least partially filled with an electrically conductive material toform an electrical pathway extending through the via. Furthermore, a“through wafer interconnect” or “TWI” is a particular type of conductivevia that extends substantially entirely through a full or partialsemiconductor wafer, or through a semiconductor device formed from sucha full or partial semiconductor wafer.

Optionally, the walls of the substrate within the via may be coated witha dielectric material. The dielectric material may comprise, forexample, an oxide, a nitride, a polymer, or a glass. Methods ofdepositing and otherwise forming such layers of dielectric material areknown in the art and may vary depending on the type of material used forthe substrate and for the dielectric layer. The via may then be at leastpartially filled with a conductive material to form a conductive via. Asan example, the conductive material may be deposited on one or moresurfaces of the substrate within the via using methods such aselectrolytic plating, electroless plating, vacuum evaporation (chemicalvapor deposition and variants), and sputtering (also termed physicalvapor deposition). Additionally, the via may be substantially entirelyfilled with the conductive material. For example, a conductive orconductor-filled epoxy may be deposited into the via in flowable formand subsequently cured, or a solder paste may be deposited into the viaand subjected to a reflow process.

After a conductive via has been formed through a substrate, thesubstrate may optionally be thinned, a redistribution layer mayoptionally be formed on one or more major surfaces of the substrate,and/or conductive bumps (i.e., solder balls or other conductive elementsin the form of columns, pillars, studs, etc.) may optionally be formedor placed on conductive terminals on the substrate.

Examples of known methods for forming conductive vias through substratesare found in, for example, U.S. Patent Application Publication No.2007/0048994, published Mar. 1, 2007, now U.S. Pat. No. 7,517,798,issued Apr. 14, 2009, to Tuttle; U.S. Pat. No. 7,109,068, issued Sep.19, 2006, to Akram et al.; and U.S. Patent Application Publication No.2006/0289968, published Dec. 28, 2006, now U.S. Pat. No. 7,795,134,issued Sep. 14, 2010, to Sulfridge. The disclosure of each of theforgoing documents is incorporated herein in its entirety by reference.

There remains a need in the art for improved methods of formingconductive vias through substrates, and for forming conductivestructures, such as redistribution layers, on such substrates.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a semiconductor wafer through which conductive vias maybe formed according to embodiments of the present invention;

FIGS. 2A through 2K are enlarged partial cross-sectional side views of aworkpiece and illustrate an embodiment of a method of the presentinvention that may be used to form a conductive via through a substrate,such as the semiconductor wafer shown in FIG. 1;

FIGS. 3A through 3H are enlarged partial cross-sectional side views of aworkpiece and illustrate another embodiment of a method of the presentinvention that may be used to form conductive vias through a substrate;

FIG. 4 depicts a cross-sectional view of an embodiment of the presentinvention that includes a circuit board having a redistribution layerformed on a major surface of a layer of substrate material and aplurality of conductive vias extending through the substrate material;and

FIG. 5 depicts a cross-sectional view of an embodiment of the presentinvention that includes a multi-chip module comprising a plurality ofsemiconductor devices, each of which includes a plurality of conductivevias extending therethrough.

DETAILED DESCRIPTION

Broadly, embodiments of the present invention include methods forforming conductive elements on and in substrates, and the resultingstructures and assemblies. The conductive structures may include, forexample, conductive vias extending through the substrates, as well asconductive pads, conductive traces, or both conductive pads andconductive traces on at least one major surface of a substrate. A layerof conductive material may be provided over at least one major surfaceof the substrate prior to forming vias through the substrate.Optionally, a temporary carrier may be secured to the layer ofconductive material on a side thereof opposite the substrate prior toforming the vias into the substrate from the side thereof opposite thelayer of conductive material. The vias may be formed through thesubstrate to the layer of conductive material.

FIG. 1 depicts an example of a workpiece 10 comprising a semiconductorwafer 2, in and on which a plurality of semiconductor devices 4 havebeen at least partially formed. The wafer 2 may be formed from a varietyof materials, such as, for example, silicon, germanium, galliumarsenide, indium phosphide, or polysilicon. In additional embodiments,the wafer 2 may comprise a silicon-on-insulator (SOI)-type substratesuch as, for example, a silicon-on-glass (SOG) substrate or asilicon-on-sapphire (SOS) substrate. It may be necessary or desirable toform one or more conductive vias through each of the semiconductordevices 4. Embodiments of methods of the present invention, which may beused for forming conductive vias through the semiconductor devices 4shown in FIG. 1, are described in further detail below. In someembodiments, the conductive vias may be formed at the so-called “waferscale” while the semiconductor devices 4 remain part of a wafer, such asthe semiconductor wafer 2 shown in FIG. 1. In other embodiments, theconductive vias may be formed through the individual semiconductordevices 4 (e.g., semiconductor dies or packages) after they have beensingulated from the semiconductor wafer 2.

FIGS. 2A through 2K are enlarged partial cross-sectional side views ofthe workpiece 10 shown in FIG. 1. FIG. 2A depicts a portion of theworkpiece 10 that includes a region of the semiconductor wafer 2 throughwhich it is desired to form a conductive via. The wafer 2 has a firstmajor surface 12 and an opposing second major surface 14. The wafer 2may have structures formed on or in the first major surface 12. Forexample, a layer of conductive material may be formed on the first majorsurface 12 and the layer of conductive material may be patterned formingconductive pads 16. For another example, a passivation layer 18,conductive traces (not shown), transistors (not shown), capacitors (notshown) (not shown), isolation regions (not shown), and other featuresmay be formed in and on the first major surface 12 of the wafer 2.

The passivation layer 18 may comprise a dielectric material such as, forexample, silicon oxide (SiO₂), silicon nitride (Si₃N₄), phosphosilicateglass (PSG), borosilicate glass (BSG), borophosphosilicate glass (BPSG),a polymer material, or any other material suitable for use as apassivation layer. The passivation layer 18 may be applied using, forexample, conventional chemical vapor deposition (CVD) methods, physicalvapor deposition (PVD) methods, spin-on methods, or any other methodsuitable for the particular type of passivation material used for thepassivation layer 18.

In some embodiments, the wafer 2 may be thinned prior to formingconductive vias therethrough. Referring to FIG. 2B, the top surface 19of the workpiece 10, which may in the case of a semiconductor substratecomprise the active surface, may be adhered to a temporary carrier 20 bymeans of an adhesive 22 to facilitate thinning of the wafer 2. Thetemporary carrier 20 may provide structural support and strength to theworkpiece 10, and may facilitate the movement and handling of theworkpiece 10 by processing equipment used to thin the semiconductorwafer 2. As used herein, the term “top” and other orientational termsare used merely for convenience and in the context of the views of thedrawings, and are not limiting of an orientation of the articlesdescribed herein during processing or use.

The wafer 2 may be thinned by removing material from the second majorsurface 14 thereof, which may comprise a back-side surface, by a processsuch as, for example, at least one of chemical etching, grinding, andchemical-mechanical polishing (CMP). As known in the art, CMP generallycomprises agitating the second major surface 14 of the wafer 2 against awetted polishing surface under controlled chemical, pressure, andtemperature conditions to remove material from the second major surface14 of the wafer 2. As a non-limiting example, the wafer 2 may have aninitial thickness of approximately seven hundred and sixty microns (760μm) and may be thinned using a CMP process to approximately eightymicrons (80 μm).

The temporary carrier 20 may comprise a semiconductor wafer, a glasssheet, or another material that may provide structural support to theworkpiece 10. In some embodiments, the temporary carrier 20 may comprisea material substantially identical to that of the wafer 2. Additionally,the temporary carrier 20 may comprise a material that exhibits acoefficient of thermal expansion (CTE) that is similar to (e.g., withinabout twenty percent (20%)) or that substantially matches a coefficientof thermal expansion (CTE) exhibited by the wafer 2. By using atemporary carrier 20 that exhibits the same or a similar coefficient ofthermal expansion as the wafer 2, the assembly (i.e., the workpiece 10and the temporary carrier 20) may be heated and/or cooled duringprocessing and handling without damaging the workpiece 10 due tothermally induced stresses.

The temporary carrier 20 may be temporarily adhered to the top surface19 of the workpiece 10 using the adhesive 22. For example, the adhesive22 may comprise a thermoplastic polymer material that will melt to apliable state when heated above a threshold temperature (i.e., the glasstransition temperature of the material). The heated and pliablethermoplastic may be sandwiched between the temporary carrier 20 and thetop surface 19 of the workpiece 10, and may substantially conform to thetop surface 19 of the workpiece 10. The thermoplastic material then maybe cooled to a temperature below the threshold temperature to cause thematerial to solidify and form an adhesive bond between the temporarycarrier 20 and the top surface 19 of the workpiece 10.

In additional embodiments, the wafer 2 may be thinned without using thetemporary carrier 20.

Prior to forming one or more conductive vias through the wafer 2, aredistribution layer, or a layer of conductive material 24 from whichsuch a redistribution layer may be formed, may be formed on or over atleast a portion of the second major surface 14 of the wafer 2, as shownin FIG. 2C.

Optionally, a layer of dielectric material 26 may be formed on thesecond major surface 14 of the wafer 2, and the layer of conductivematerial 24 may be formed on the layer of dielectric material 26. Thelayer of dielectric material 26 may comprise, for example, a pulseddeposition layer (PDL) comprising aluminum-rich oxide, low silane oxide(LSO), a PARYLENE™ polymer such as that which is available fromSpecialty Coating Systems, silicon dioxide (SiO₂), aluminum oxide(Al₂O₃), an organic polymeric material suitable for passivation purposessuch as polybenzoxazole (PBO) or benzocyclobutene (BCB), or combinationsof any such materials. Other dielectric materials that may be used asthe layer of dielectric material 26 include tetraethyl orthosilicate(TEOS), spin-on glass, thermal oxide, silicon nitride, siliconoxynitride, a glass (i.e., borophosphosilicate glass (BPSG),phosphosilicate glass, or borosilicate glass), or any other suitabledielectric material known in the art. Methods of depositing such layerof dielectric material 26 are known by those of ordinary skill in theart and vary depending on the type of material used for the layer ofdielectric material 26. The layer of dielectric material 26 may preventshorting between the layer of conductive material 24 and conductive orsemiconductive elements within the wafer 2.

In some embodiments, the layer of conductive material 24 may comprise,without limitation, titanium (Ti), polysilicon (Si), palladium (Pd), tin(Sn), tantalum (Ta), tungsten (W), cobalt (Co), copper (Cu), silver(Ag), aluminum (Al), iridium (Ir), gold (Au), molybdenum (Mo), platinum(Pt), nickel-phosphorus (NiP), palladium-phosphorus (Pd—P),cobalt-phosphorus (Co—P), a cobalt-tungsten-phosphorous (Co—W—P) alloy,other alloys of any of the foregoing metals, a conductive polymer orconductive material entrained in a polymer (i.e., conductive orconductor-filled epoxy), and mixtures thereof.

In additional embodiments, the layer of conductive material 24 itselfmay comprise a plurality of layers, which may include, for example, aplating-attractive coating (PAC) or another type of seed layer that isformed over the layer of dielectric material 26 to enhance deposition ofa bulk layer of conductive material thereon, the seed layer and the bulklayer together forming the layer of conductive material 24. Forinstance, titanium nitride (TiN) may be formed over the layer ofdielectric material 26 using chemical vapor deposition (CVD) techniques,and the titanium nitride may be used as a PAC for a plating process suchas, for example, electroless or electrolytic plating used to form thelayer of conductive material 24.

Other processes that may be used to deposit materials used to form thelayer of conductive material 24 include, for example, metalorganicchemical vapor deposition (MOCVD), physical vapor deposition (PVD),plasma-enhanced chemical vapor deposition (PECVD), vacuum evaporation,and sputtering.

The layer of conductive material 24 may be formed with the temporarycarrier 20 adhered to the top surface 19 of the workpiece 10, or may beformed without the temporary carrier 20 adhered to the top surface 19 ofthe workpiece 10.

After forming the layer of conductive material 24 over the second majorsurface 14 of the wafer 2, the temporary carrier 20 may be moved fromthe top surface 19 of the workpiece 10 to the bottom surface 27 of theworkpiece 10, as shown in FIG. 2D, or another temporary carrier 20 maybe employed. To remove the temporary carrier 20 from the top surface 19of the workpiece 10, the adhesive 22 of the temporary carrier 20 may bereleased from the top surface 19 of the workpiece 10 (e.g., by heatingthe adhesive 22). Adhesive 22 then may be used to temporarily adhere thetemporary carrier 20 to the bottom surface 27 of the workpiece 10 insubstantially the same manner previously described for adhering thetemporary carrier 20 to the top surface 19 of the workpiece 10.

FIG. 2E depicts the wafer 2 with a via 28 formed therein. As shown inFIG. 2E, the via 28 may extend completely through the conductive pad 16and the wafer 2 to the layer of dielectric material 26, such that thelayer of dielectric material 26 is exposed at, and forms the bottomsurface 30 of, the via 28. In additional embodiments, the via 28 mayalso extend through the layer of dielectric material 26 to the layer ofconductive material 24, such that the layer of conductive material 24 isexposed at, and forms the bottom surface 30 of, the via 28.

The via 28 may be formed through the conductive pad 16 and the wafer 2(and, optionally, through the layer of dielectric material 26) from theexposed surface of the conductive pad 16 on the top surface 19 of theworkpiece 10 shown in FIG. 2E. By way of example and not limitation, amask layer may be deposited over the top surface 19 of the workpiece 10shown in FIG. 2E, and the mask layer may be patterned using aconventional photolithography process to form an aperture extendingthrough the mask layer over the conductive pad 16 at the location atwhich it is desired to form the via 28. An etching process (e.g., a wetchemical etching process or a dry reactive ion etching process) then maybe used to etch through the conductive pad 16 and the wafer 2 (and,optionally, through the layer of dielectric material 26). One suitablewet chemical etchant that may be used to form the via 28 comprises amixture of nitric acid and hydrofluoric (HF) acid in deionized (DI)water.

In additional embodiments, the via 28 may be formed by mechanicaldrilling or laser ablation. After forming the via 28, the via 28optionally may be subjected to a cleaning process to remove any unwantedreactants or impurities from the workpiece 10, particularly in the caseof laser ablation, portions of the substrate material adjacent the viain the so-called “heat-affected zone,” or “HAZ,” of the substrate. Onesuitable cleaning solvent for such purpose is a solution comprisingabout 6% tetramethyl ammonium hydroxide (TMAH) in propylene glycol.

In some embodiments, sidewalls 34 of the workpiece 10 within the via 28may be electrically insulated by applying a dielectric material thereto.Referring to FIG. 2F, a layer of dielectric material 32 may be formed onthe top surface 19 of the workpiece 10 and the exposed surfaces of theworkpiece 10 within the via 28, including the sidewalls 34 and thebottom surface 30. By way of example and not limitation, the layer ofdielectric material 32 may comprise an oxide material, a nitridematerial, or a polymer material, and be formed in a similar manner tothat previously described in relation to the layer of dielectricmaterial 26 with reference to FIG. 2C.

As shown in FIG. 2G, an anisotropic etching process (often referred toas a “spacer” etching process) may be used to selectively remove thegenerally horizontally extending portions of the layer of dielectricmaterial 32 from the workpiece 10, including the portion extending overthe top surface 19 of the workpiece 10 and the bottom surface 30 withinthe via 28, but leaving behind the generally vertically extendingportions of the layer of dielectric material 32 on the sidewalls 34within the via 28. After such an etching process, dielectric material 32may be disposed on the sidewalls 34 within the via 28. The bottomsurface 30 within the via 28 may be substantially free of any dielectricmaterial, and the layer of conductive material 24 may be exposed withinthe via 28 and may form the bottom surface 30 within the via 28.Additionally, electrically conductive structures, such as the conductivepads 16, may have at least a portion of their upper contact surface 36exposed and substantially free of dielectric material.

Referring to FIG. 2H, a conductive material 38 may be deposited withinthe via 28 to form a conductive via 40 that provides electricalcommunication between the conductive pad 16 on the first major surface12 of the wafer 2 and the layer of conductive material 24 on the secondmajor surface 14 of the wafer 2. As shown in FIG. 2H, in someembodiments, the conductive material 38 may not entirely fill the via28, and may be disposed on the sidewalls 34 within the via 28. Inadditional embodiments, however, the via 28 may be substantiallyentirely filled with the conductive material 38. In some embodiments,the conductive material 38 may extend at least partially over the uppercontact surface 36 of the conductive pad 16 adjacent the conductive via40.

In some embodiments, conductive material 38 may be deposited within thevia 28 using, for example, chemical vapor deposition (CVD) processes,physical vapor deposition (PVD) processes, atomic layer deposition (ALD)processes, electroplating processes, electroless plating processes, orany combination of the above processes. In additional embodiments, theconductive material 38 may be deposited in the via 28 as a paste (e.g.,a solder paste), and the paste within the via 28 then may be subjectedto a reflow process wherein the paste is heated, and conductive material38 therein is melted and subsequently allowed to cool and to solidifywithin the via 28. In yet other embodiments, the conductive material 38may comprise a conductive or conductor-filled polymer material (e.g.,epoxy). Such a material may be provided within the via 28 in an uncured,flowable liquid or gel state, after which the uncured polymer may becured (e.g., using heat, electromagnetic radiation, or the addition ofchemical reactants or catalysts) to solidify the material within the via28 and form the conductive via 40. Furthermore, in some embodiments, theconductive material 38 may have a multilayer structure comprising aplurality of layers of conductive material. For example, the conductivematerial 38 may comprise a first layer of conductive material depositedwithin the via 28 using an electroless plating technique, and a secondlayer of conductive material deposited over the first layer ofconductive material using an electroplating technique. As anotherexample, the conductive material 38 may comprise at least one of a layerof barrier material, a layer of adhesion material, and a noble metal caplayer, in addition to a bulk conductive material used to form theconductive via 40. As used herein, the term “barrier material” means anymaterial selected to prevent the migration of matter (e.g., atoms,molecules, etc.) through the material. As used herein, the term“adhesion material” means any material selected to facilitate adhesionof a first material immediately adjacent a first surface of the materialto a second material immediately adjacent another surface of thematerial.

After forming the conductive via 40 in the workpiece 10 in a manner thatprovides electrical communication through the wafer 2 between theconductive pad 16 and the layer of conductive material 24, the layer ofconductive material 24 may be selectively patterned (e.g., blanketdeposited and removed from selected regions, or deposited on onlyselected regions) to form conductive pads, conductive traces, or bothconductive pads and conductive traces from the layer of conductivematerial 24, as described in further detail below.

Referring to FIG. 2I, in some embodiments, the temporary carrier 20 maybe removed from the bottom surface 27 of the workpiece 10 to expose thelayer of conductive material 24. Optionally, that same temporary carrier20 or a different temporary carrier 20 may be adhered to the top surface19 of the workpiece 10 to facilitate handling and processing of theworkpiece 10 as the layer of conductive material 24 is selectivelypatterned.

FIG. 2J depicts the workpiece 10 after the layer of conductive material24 has been selectively patterned to form a conductive pad 42 directlyover (i.e., vertically aligned with) each of the conductive vias 40. Aspreviously mentioned, however, in additional embodiments, the layer ofconductive material 24 may be selectively patterned to form, forexample, conductive pads, conductive traces, or both conductive pads andconductive traces comprising a redistribution layer (RDL) from the layerof conductive material 24. By way of example and not limitation, thelayer of conductive material 24 may be selectively patterned using amasking and etching process, as known in the art.

FIG. 2K depicts the workpiece 10 in which the conductive via 40 has beenformed, and the optional temporary carrier 20 (FIG. 2J) has beenremoved.

Although not described herein, additional processes may be performed onthe workpiece 10 as necessary or desirable. For example, conductivesolder bumps (e.g., solder balls) or other conductive orconductor-filled elements (see FIG. 5) may be formed on at least some ofthe conductive pads 42 and/or the conductive pads 16, individualsemiconductor devices may be singulated from the wafer 2, and theindividual semiconductor devices may be packaged. If the conductivematerial 38 of the conductive via 40 does not completely fill the via28, the remaining void may be filled with a polymer or other dielectricmaterial.

Additional embodiments of methods of the present invention, in which thelayer of conductive material 24 is selectively patterned prior toformation of the conductive via 40, are described below with referenceto FIGS. 3A through 3H.

As shown in FIG. 3A, a workpiece 10 may be provided that issubstantially identical to that shown in FIG. 2C using methods such asthose previously described herein with reference to FIGS. 2A through 2C.As shown in FIG. 3A, the workpiece 10 includes a passivation layer 18and a plurality of conductive pads 16 over (e.g., on) a first majorsurface 12 of a wafer 2 or any other type of substrate. Additionally,the workpiece 10 may comprise a layer of dielectric material 26 and alayer of conductive material 24 over (e.g., on) a second major surface14 of the wafer 2 or other type of substrate. Optionally, a temporarycarrier 20 may be adhered to the top surface 19 of the workpiece 10 (asshown in FIG. 3A) using an adhesive 22 to facilitate handling andprocessing of the workpiece 10, as previously described herein.

Referring to FIG. 3B, the layer of conductive material 24 may beselectively patterned (e.g., blanket deposited and removed from selectedregions, or deposited on only selected regions) to form conductive pads,conductive traces, or both conductive pads and conductive traces fromthe layer of conductive material 24. By way of example and notlimitation, the layer of conductive material 24 may be selectivelypatterned to form an RDL comprising a plurality of conductive traceseach extending from a conductive via 40 (FIG. 3G) to a conductive pad 42at a location over the second major surface 14 of the wafer 2 remotefrom the respective conductive via 40.

Patterning the layer of conductive material 24 prior to forming theconductive via 40 (FIG. 3G) in the wafer 2 may reduce the number oftimes that the temporary carrier 20 is transferred between the topsurface 19 and the bottom surface 27 of the workpiece 10.

As shown in FIG. 3C, after selectively patterning the layer ofconductive material 24, the temporary carrier 20 may be transferred tothe bottom surface 27 of the workpiece 10 using an adhesive 22 tofacilitate handling and processing of the workpiece 10 as conductivevias 40 (FIG. 3G) are formed therein.

As illustrated in FIG. 3D, a via 28 may be formed through the wafer 2,as previously described in relation to FIG. 2E. As depicted in FIG. 3E,a layer of dielectric material 32 may be deposited on the top surface 19of the workpiece 10, including within the via 28, as previouslydescribed in relation to FIG. 2F. As shown in FIG. 3F, an anisotropicetching process, such as a reactive ion etch, may be used to selectivelyremove the generally horizontally extending portions of the layer ofdielectric material 32 from the workpiece 10, including the portionextending over the top surface 19 of the workpiece 10 and the bottomsurface 30 within the via 28, but leaving behind the generallyvertically extending portions of the layer of dielectric material 32 onthe sidewalls 34 within the via 28, as previously described in relationto FIG. 2G. Referring to FIG. 3G, conductive material 38 may bedeposited within the via 28 to form a conductive via 40, as previouslydescribed in relation to FIG. 2H. The temporary carrier 20 may beremoved from the bottom surface 27 of the workpiece 10 as shown in FIG.3H.

As mentioned previously herein, additional processes may be performed onthe workpiece 10 as necessary or desirable. For example, conductivesolder bumps (e.g., solder balls) or other conductive orconductor-filled elements (see FIG. 5) may be formed on at least some ofthe conductive pads 42 and/or the conductive pads 16, individualsemiconductor devices may be singulated from the wafer 2, and theindividual semiconductor devices may be packaged.

Although the embodiments of methods of the present invention have beendescribed hereinabove with reference to a substrate comprising a wafer2, embodiments of the present invention are equally applicable to, andencompass, other types of substrates.

For example, FIG. 4 depicts an embodiment of the present inventioncomprising a circuit board 100. As shown in FIG. 4, the circuit board100 has a first major surface 106 and an opposing, second major surface108. A conductive layer 102 may be formed on or over at least the secondmajor surface 108. The conductive layer 102 may include conductive pads110, conductive traces 112, or both conductive pads 110 and conductivetraces 112, as shown in FIG. 4. Conductive vias 104 may extend throughthe circuit board 100 and communicate electrically with conductive pads110 and/or conductive traces 112 of the conductive layer 102. Theconductive layer 102 and the conductive vias 104 may be formed on and inthe circuit board 100 using the methods previously described herein withreference to FIGS. 2A through 2K and FIGS. 3A through 3H.

By way of example and not limitation, the circuit board 100 may comprisea motherboard of a computer system or other electronic device. Asanother non-limiting example, the circuit board 100 may comprise aninterposer configured to be disposed between a semiconductor device(e.g., a memory device, an imaging device, or an electronic signalprocessor) and a higher-level substrate (e.g., a motherboard). In suchembodiments, the conductive layer 102 may comprise a redistributionlayer.

FIG. 5 illustrates yet another embodiment of the present inventioncomprising a multi-chip module 121. As used herein, the term “multi-chipmodule” means a semiconductor device comprising two or more individualsemiconductor devices, each comprising an integrated circuit, that havebeen packaged into a single module. In the embodiment shown in FIG. 5,the multi-chip module 121 comprises a first semiconductor device 122 anda second semiconductor device 124. The multi-chip module 121 isillustrated in FIG. 5 as being structurally and electrically coupled toa higher-level substrate, such as a circuit board 120. As shown, suchcoupling may be effected, as a non-limiting example, by conductiveelements 131 in the form of solder or a conductive or conductor-filledresin. In some embodiments, the first semiconductor device 122 and thesecond semiconductor device 124 may each comprise a memory device. Inadditional embodiments, one or both of the first semiconductor device122 and the second semiconductor device 124 may comprise an electronicsignal processor, an imaging device, an application specific integratedcircuit (ASIC), or any other type of semiconductor device. As shown inFIG. 5, each of the first semiconductor device 122 and the secondsemiconductor device 124 may comprise a plurality of conductive vias125, as well as conductive traces 130 and/or conductive pads 132. Theconductive vias 125 and the conductive traces 130 and/or conductive pads132 may be formed on and in the first semiconductor device 122 and thesecond semiconductor device 124 (before the semiconductor devices 122,124 are assembled together to form the multi-chip module 121) using themethods previously described herein with reference to FIGS. 2A through2K and FIGS. 3A through 3H.

The methods previously described herein may be used to form conductivevias and conductive layers that include, for example, conductive tracesand/or conductive vias on and in many other types of substrates used inelectronic devices and systems.

While the present invention has been described in terms of certainillustrated embodiments and variations thereof, it will be understoodand appreciated by those of ordinary skill in the art that the inventionis not so limited. Rather, additions, deletions and modifications to theillustrated embodiments may be effected without departing from thespirit and scope of the invention as defined by the claims that follow.

What is claimed is:
 1. A method for forming conductive elements on andin a substrate, the method comprising: at least substantially entirelycovering a first major surface of a substrate with a conductivematerial; subsequently forming a plurality of vias through the substratefrom a second major surface of the substrate opposing the first majorsurface to the conductive material; and forming each via of theplurality of vias to comprise a bottom surface comprising the conductivematerial.
 2. The method of claim 1, further comprising selecting thesubstrate to comprise a wafer.
 3. The method of claim 1, furthercomprising providing conductive material over the second major surfaceof the substrate.
 4. The method of claim 3, further comprisingpatterning the conductive material over the second major surface of thesubstrate to form a plurality of conductive pads.
 5. The method of claim4, wherein forming the plurality of vias through the substrate furthercomprises forming each via of the plurality of vias through a conductivepad of the plurality of conductive pads.
 6. The method of claim 1,further comprising depositing conductive material within each via of theplurality of vias to form a plurality of conductive vias extendingthrough the substrate, and establishing electrical contact between eachconductive via of the plurality of conductive vias and the conductivematerial on the first major surface of the substrate.
 7. The method ofclaim 6, further comprising providing dielectric material on at leastone sidewall within each via of the plurality of vias prior todepositing conductive material within each via of the plurality of vias.8. The method of claim 7, wherein providing the dielectric materialcomprises: depositing the dielectric material over the substrate and onexposed surfaces within each via of the plurality of vias; andanisotropically etching the dielectric material to expose the conductivematerial on the first major surface of the substrate within each via ofthe plurality of vias.
 9. The method of claim 7, wherein providing thedielectric material comprises depositing a pulsed deposition oxidematerial.
 10. The method of claim 1, further comprising patterning theconductive material on the first major surface of the substrate prior toforming the plurality of vias through the substrate.
 11. The method ofclaim 10, wherein patterning the conductive material on the first majorsurface of the substrate comprises forming a redistribution layer. 12.The method of claim 10, wherein patterning the conductive material onthe first major surface of the substrate comprises forming a pluralityof conductive pads from the conductive material on the first majorsurface of the substrate.
 13. The method of claim 12, wherein formingthe plurality of conductive pads from the conductive material on thefirst major surface of the substrate comprises forming each conductivepad of the plurality of conductive pads to be in vertical alignment witha via of the plurality of vias.
 14. The method of claim 13, whereinforming the plurality of vias through the substrate comprises formingeach via of the plurality of vias through the substrate to a conductivepad of the plurality of conductive pads formed from the conductivematerial on the first major surface of the substrate.
 15. The method ofclaim 14, further comprising providing a conductive bump on eachconductive pad of the plurality of conductive pads formed from theconductive material on the first major surface of the substrate.
 16. Themethod of claim 1, further comprising adhering a temporary carrier tothe substrate on a side thereof adjacent the second major surface andremoving material from the first major surface of the substrate prior toat least substantially entirely covering the first major surface of thesubstrate with the conductive material.
 17. The method of claim 16,further comprising: removing the temporary carrier from the side of thesubstrate adjacent the second major surface; and adhering a temporarycarrier to a side of the substrate adjacent the first major surface. 18.The method of claim 17, wherein forming the plurality of vias throughthe substrate comprises forming the plurality of vias through thesubstrate while the temporary carrier is adhered to the side of thesubstrate adjacent the first major surface.